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0072907223 image MICROMACHINED TRANSDUCERS SOURCEBOOK
Author:
Gregory T. Kovacs, STANFORD UNIV
  • Request a Review Copy
  • ISBN: 0-07-290722-3
    Description: ©1998 / Hardcover / 944 pages
    Publication Date: February 1998
    Overview

    This is the first textbook to provide a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. The book takes a practical approach to the subject and studies key design issues by examining the fabrication of different devices.
    Table of Contents
    1 Introduction and Overview
    2 Micromachining Techniques
    3 Mechanical Transducers
    4 Optical Transducers
    5 Ionizing Radiation Transducers
    6 Thermal Transducers
    7 Magnetic & Electromagnetic Transducers
    8 Chemical & Biological Transducers
    9 Microfluidic Devices